Design and batch fabrication of probes for sub-100 nm scanning thermal microscopy

Citation:

L. Shi, Kwon, O., Miner, C. C., and Majumdar, A., “Design and batch fabrication of probes for sub-100 nm scanning thermal microscopy,” Journal of Microelectromechanical Systems, vol. 10, pp. 370-378, 2001.

Abstract:

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Publisher's Version